Vacuum Gate Valve

Vacuum Gate Valve

Specification Actuator Type Pneumatic/Manual Flange Size CF2.5“-10”/ISOF63-250 Gate Seal FKM o-ring (Optional for FFKM) Operate Pressure Range 1000mbar~1.33x10^-8mbar Leak Rate 1.33x10^-9mbar I/s,He T

Specification

Actuator Type Pneumatic/Manual
Flange Size CF2.5“-10”/ISOF63-250
Gate Seal FKM o-ring (Optional for FFKM)
Operate Pressure Range 1000mbar~1.33x10^-8mbar
Leak Rate 1.33x10^-9mbar I/s,He
Temperature for valve body 250°C(482°F)0pen,200℃(392°F)closed
Temperature for actuator 100℃((212°F)
Temperature for solenoid/position indicator 80°C(176°F)
Valve body material SUS304L(0ptional for SUS316 L)
Mechanism material SUS304L
Actuatormaterial SUS304L,Aluminum
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